View Details
Festo
MS6-LR-AGE-D6
MFR #MS6-LR-AGE-D6
SKU #YLS4LX91QILKOI
Photo may not represent actual item. Refer to name and product specs for all details.
Festo MS6-LR-1/4-D6-VS
Pressure regulator. High flow rate performance with minimal pressure drop. Good control characteristics with minimal pressure hysteresis and primary pressure compensation. With or without secondary exhausting. Lockable rotary knob. Optional pressure sensor and rotary knob pressure gauge. Sustainable operation thanks to reduced pressure level. Standard nominal flow rate <=6.500 l/min with grid dimension 62 mm
Size6
SeriesMS
Actuator lockRotary knob with detent
Mounting positionAny
DesignDirectly actuated diaphragm regulator
Symbol00991559
About This Product
Pressure regulator. High flow rate performance with minimal pressure drop. Good control characteristics with minimal pressure hysteresis and primary pressure compensation. With or without secondary exhausting. Lockable rotary knob. Optional pressure sensor and rotary knob pressure gauge. Sustainable operation thanks to reduced pressure level. Standard nominal flow rate <=6.500 l/min with grid dimension 62 mm
Festo MS6-LR-1/4-D6-VS
- Genuine, certified Festo product
- Fast sourcing through a worldwide supply network
- Product selection and compatibility support from our technical team
- Equivalent and alternative product suggestions
- Quotation and lead time tailored to your request
Specifications
Size6
SeriesMS
Actuator lockRotary knob with detent
Mounting positionAny
DesignDirectly actuated diaphragm regulator
Controller functionOutput pressure constant, With secondary exhausting, With return flow function
Symbol00991559
Operating pressure0.08, 2
Operating pressure0.8, 20
Pressure regulation range0.3, 7
Max. pressure hysteresis0.025
Max. pressure hysteresis0.25
Max. pressure hysteresis3.625
Standard nominal flow rate (standardised to DIN 1343)5500
Operating mediumCompressed air to ISO 8573-1:2010 [7:4:4], Inert gas
Note on operating and pilot mediumLubricated operation possible (in which case lubricated operation will always be required)
Corrosion resistance class CRC2 - Moderate corrosion stress
LABS (PWIS) conformityVDMA24364-B1/B2-L
Storage temperature-10, 60
Suitable for use with foodSee supplementary material information
Media temperature-10, 60
Ambient temperature-10, 60
Product weight730
Type of mountingWith accessories
Pneumatic connection, port 1G1/4
Pneumatic connection, port 2G1/4
Note on materialsRoHS compliant
Material control panelProcess automation, POM
Material sealsNBR
Material housingDie-cast aluminium
Material membraneNBR
Accessories 238
Genuine accessories that can be used with the Festo MS6-LR-1/4-D6-VS motor and are supplied separately are listed below. Click a code to open the accessory page and see the other compatible motors.
| Part no | Description | Compatible motors |
|---|---|---|
| QSL-1/4-6 | Push-in L-fitting · Push-in fittings | |
| QSL-1/4-8 | Push-in L-fitting · Push-in fittings | |
| QSL-1/4-10 | Push-in L-fitting · Push-in fittings | |
| QSLL-1/4-6 | Push-in L-fitting, long · Push-in fittings | |
| QSLL-1/4-8 | Push-in L-fitting, long · Push-in fittings | |
| QSLL-1/4-10 | Push-in L-fitting, long · Push-in fittings | |
| QS-1/4-6 | Push-in fitting · Push-in fittings | |
| QS-1/4-8 | Push-in fitting · Push-in fittings | |
| QS-1/4-10 | Push-in fitting · Push-in fittings | |
| QS-1/4-6-I | Push-in fitting · Push-in fittings | |
| QS-1/4-8-I | Push-in fitting · Push-in fittings | |
| QS-1/4-10-I | Push-in fitting · Push-in fittings | |
| QSY-1/4-6 | Push-in Y-fitting · Push-in fittings | |
| QSY-1/4-8 | Push-in Y-fitting · Push-in fittings | |
| QSY-1/4-10 | Push-in Y-fitting · Push-in fittings | |
| QSYL-1/4-6 | Push-in Y-fitting · Push-in fittings | |
| QSYL-1/4-8 | Push-in Y-fitting · Push-in fittings | |
| QSYL-1/4-10 | Push-in Y-fitting · Push-in fittings | |
| QSTF-1/4-6-B | Push-in T-fitting · Push-in fittings | |
| QSTF-1/4-8-B | Push-in T-fitting · Push-in fittings | |
| QSTF-1/4-10-B | Push-in T-fitting · Push-in fittings | |
| QSYLV-1/4-8 | Push-in Y-fitting · Push-in fittings | |
| QSYTF-1/4-8-B | Multiple distributor · Push-in fittings | |
| QST-1/4-6 | Push-in T-fitting · Push-in fittings | |
| QST-1/4-8 | Push-in T-fitting · Push-in fittings | |
| QST-1/4-10 | Push-in T-fitting · Push-in fittings | |
| QSTL-1/4-6 | Push-in T-fitting · Push-in fittings | |
| QSTL-1/4-8 | Push-in T-fitting · Push-in fittings | |
| QSTL-1/4-10 | Push-in T-fitting · Push-in fittings | |
| QSLV6-1/4-6 | Multiple distributor · Push-in fittings | |
| QSLV6-1/4-8 | Multiple distributor · Push-in fittings | |
| QSLV6-1/4-10 | Multiple distributor · Push-in fittings | |
| QSQ-1/4-6 | Multiple distributor · Push-in fittings | |
| QSQ-1/4-4 | Multiple distributor · Push-in fittings | |
| QSLV3-1/4-6 | Multiple distributor · Push-in fittings | |
| QSLV3-1/4-8 | Multiple distributor · Push-in fittings | |
| QSLV3-1/4-10 | Multiple distributor · Push-in fittings | |
| QSLV4-1/4-6 | Multiple distributor · Push-in fittings | |
| QSLV4-1/4-8 | Multiple distributor · Push-in fittings | |
| QSLV4-1/4-10 | Multiple distributor · Push-in fittings | |
| QSR-1/4-6 | Push-in fitting, rotatable · Push-in fittings | |
| QSR-1/4-8 | Push-in fitting, rotatable · Push-in fittings | |
| QSRL-1/4-6 | Push-in L-fitting, rotatable · Push-in fittings | |
| QSRL-1/4-8 | Push-in L-fitting, rotatable · Push-in fittings | |
| QSMK-1/4-6 | Push-in fitting, self-sealing · Push-in fittings | |
| QSK-1/4-8 | Push-in fitting, self-sealing · Push-in fittings | |
| QSK-1/4-10 | Push-in fitting, self-sealing · Push-in fittings | |
| QSMKL-1/4-6 | Push-in L-fitting,self-sealing · Push-in fittings | |
| QSKL-1/4-8 | Push-in L-fitting,self-sealing · Push-in fittings | |
| QSKL-1/4-10 | Push-in L-fitting,self-sealing · Push-in fittings | |
| QSL-V0-1/4-6 | Push-in L-fitting · Push-in fittings | |
| QSL-V0-1/4-8 | Push-in L-fitting · Push-in fittings | |
| QSL-V0-1/4-12 | Push-in L-fitting · Push-in fittings | |
| QSL-V0-1/4-10 | Push-in L-fitting · Push-in fittings | |
| QST-V0-1/4-6 | Push-in T-fitting · Push-in fittings | |
| QST-V0-1/4-10 | Push-in T-fitting · Push-in fittings | |
| QST-V0-1/4-8 | Push-in T-fitting · Push-in fittings | |
| QST-V0-1/4-12 | Push-in T-fitting · Push-in fittings | |
| QS-1/4-12 | Push-in fitting · Push-in fittings | |
| QSL-1/4-12 | Push-in L-fitting · Push-in fittings | |
| QS-1/4-5/16-I-U-M | Push-in fitting · Push-in fittings | |
| QS-1/4-3/8-I-U-M | Push-in fitting · Push-in fittings | |
| QS-G1/4-6 | Push-in fitting · Push-in fittings | |
| QS-G1/4-8 | Push-in fitting · Push-in fittings | |
| QST-G1/4-6 | Push-in T-fitting · Push-in fittings | |
| QST-G1/4-8 | Push-in T-fitting · Push-in fittings | |
| QST-G1/4-10 | Push-in T-fitting · Push-in fittings | |
| QSTL-G1/4-6 | Push-in T-fitting · Push-in fittings | |
| QSTL-G1/4-8 | Push-in T-fitting · Push-in fittings | |
| QSTL-G1/4-10 | Push-in T-fitting · Push-in fittings | |
| QSY-G1/4-6 | Push-in Y-fitting · Push-in fittings | |
| QSY-G1/4-8 | Push-in Y-fitting · Push-in fittings | |
| QSY-G1/4-10 | Push-in Y-fitting · Push-in fittings | |
| QSYL-G1/4-6 | Push-in Y-fitting · Push-in fittings | |
| QSYL-G1/4-8 | Push-in Y-fitting · Push-in fittings | |
| QSYL-G1/4-10 | Push-in Y-fitting · Push-in fittings | |
| QS-G1/4-10 | Push-in fitting · Push-in fittings | |
| QS-G1/4-6-I | Push-in fitting · Push-in fittings | |
| QS-G1/4-8-I | Push-in fitting · Push-in fittings | |
| QS-G1/4-10-I | Push-in fitting · Push-in fittings | |
| QSL-G1/4-6 | Push-in L-fitting · Push-in fittings | |
| QSL-G1/4-8 | Push-in L-fitting · Push-in fittings | |
| QSL-G1/4-10 | Push-in L-fitting · Push-in fittings | |
| QSLL-G1/4-6 | Push-in L-fitting, long · Push-in fittings | |
| QSLL-G1/4-8 | Push-in L-fitting, long · Push-in fittings | |
| QSLL-G1/4-10 | Push-in L-fitting, long · Push-in fittings | |
| QSLV4-G1/4-6 | Multiple distributor · Push-in fittings | |
| QSLV4-G1/4-8 | Multiple distributor · Push-in fittings | |
| QSLV4-G1/4-10 | Multiple distributor · Push-in fittings | |
| QSLV6-G1/4-6 | Multiple distributor · Push-in fittings | |
| QSLV6-G1/4-8 | Multiple distributor · Push-in fittings | |
| QSLV6-G1/4-10 | Multiple distributor · Push-in fittings | |
| QSQ-G1/4-6 | Multiple distributor · Push-in fittings | |
| QSR-G1/4-6 | Push-in fitting, rotatable · Push-in fittings | |
| QSR-G1/4-8 | Push-in fitting, rotatable · Push-in fittings | |
| QSRL-G1/4-6 | Push-in L-fitting, rotatable · Push-in fittings | |
| QSRL-G1/4-8 | Push-in L-fitting, rotatable · Push-in fittings | |
| QSMK-G1/4-6 | Push-in fitting, self-sealing · Push-in fittings | |
| QSK-G1/4-8 | Push-in fitting, self-sealing · Push-in fittings | |
| QSTF-G1/4-6 | Push-in T-fitting · Push-in fittings | |
| QSTF-G1/4-8 | Push-in T-fitting · Push-in fittings | |
| QSTF-G1/4-10 | Push-in T-fitting · Push-in fittings | |
| QSYLV-G1/4-8 | Push-in Y-fitting · Push-in fittings | |
| QSYTF-G1/4-8 | Multiple distributor · Push-in fittings | |
| QSQ-G1/4-4 | Multiple distributor · Push-in fittings | |
| QSLV3-G1/4-6 | Multiple distributor · Push-in fittings | |
| QSLV3-G1/4-8 | Multiple distributor · Push-in fittings | |
| QSLV3-G1/4-10 | Multiple distributor · Push-in fittings | |
| QST-V0-G1/4-10 | Push-in T-fitting · Push-in fittings | |
| QST-V0-G1/4-12 | Push-in T-fitting · Push-in fittings | |
| QS-G1/4-12 | Push-in fitting · Push-in fittings | |
| QSL-G1/4-12 | Push-in L-fitting · Push-in fittings | |
| QSK-G1/4-10 | Push-in fitting, self-sealing · Push-in fittings | |
| QSMKL-G1/4-6 | Push-in L-fitting,self-sealing · Push-in fittings | |
| QSKL-G1/4-8 | Push-in L-fitting,self-sealing · Push-in fittings | |
| QSKL-G1/4-10 | Push-in L-fitting,self-sealing · Push-in fittings | |
| QSL-V0-G1/4-6 | Push-in L-fitting · Push-in fittings | |
| QSL-V0-G1/4-8 | Push-in L-fitting · Push-in fittings | |
| QSL-V0-G1/4-10 | Push-in L-fitting · Push-in fittings | |
| QSL-V0-G1/4-12 | Push-in L-fitting · Push-in fittings | |
| QST-V0-G1/8-8 | Push-in T-fitting · Push-in fittings | |
| QST-V0-G1/4-6 | Push-in T-fitting · Push-in fittings | |
| QST-V0-G1/4-8 | Push-in T-fitting · Push-in fittings | |
| QS-1/4-4 | Push-in fitting · Push-in fittings | |
| QS-1/4-12-I | Push-in fitting · Push-in fittings | |
| QSL-1/4-4 | Push-in L-fitting · Push-in fittings | |
| QSLL-1/4-4 | Push-in L-fitting, long · Push-in fittings | |
| QST-1/4-4 | Push-in T-fitting · Push-in fittings | |
| QST-1/4-12 | Push-in T-fitting · Push-in fittings | |
| QSY-1/4-4 | Push-in Y-fitting · Push-in fittings | |
| QS-1/4-1/4-I-U-M | Push-in fitting · Push-in fittings | |
| LCK-1/4-PK-9 | Elbow quick connector · Quick connectors | |
| CN-1/4-PK-4 | Barbed fitting · Quick connectors | |
| CN-1/4-PK-6 | Barbed fitting · Quick connectors | |
| TCN-1/4-PK-4 | Barbed T-fitting · Quick connectors | |
| TCN-1/4-PK-6 | Barbed T-fitting · Quick connectors | |
| LCN-1/4-PK-4 | Barbed elbow fitting · Quick connectors | |
| LCN-1/4-PK-6 | Barbed elbow fitting · Quick connectors | |
| QST-1/4-6-100 | Push-in T-fitting · Push-in fittings | |
| QST-1/4-8-50 | Push-in T-fitting · Push-in fittings | |
| QST-1/4-10-50 | Push-in T-fitting · Push-in fittings | |
| QSL-1/4-8-50 | Push-in L-fitting · Push-in fittings | |
| QSL-1/4-6-100 | Push-in L-fitting · Push-in fittings | |
| QSL-1/4-10-50 | Push-in L-fitting · Push-in fittings | |
| QSL-1/4-12-20 | Push-in L-fitting · Push-in fittings | |
| QSTL-1/4-6-100 | Push-in T-fitting · Push-in fittings | |
| QSTL-1/4-8-50 | Push-in T-fitting · Push-in fittings | |
| QSTL-1/4-10-50 | Push-in T-fitting · Push-in fittings | |
| QSW-1/4-6 | Push-in fitting · Push-in fittings | |
| QS-1/4-6-100 | Push-in fitting · Push-in fittings | |
| QS-1/4-8-50 | Push-in fitting · Push-in fittings | |
| QS-1/4-10-50 | Push-in fitting · Push-in fittings | |
| QS-1/4-12-20 | Push-in fitting · Push-in fittings | |
| QSW-1/4-8 | Push-in fitting · Push-in fittings | |
| QSW-1/4-10 | Push-in fitting · Push-in fittings | |
| QS-G1/4-8-50 | Push-in fitting · Push-in fittings | |
| QS-G1/4-12-20 | Push-in fitting · Push-in fittings | |
| QS-G1/4-10-50 | Push-in fitting · Push-in fittings | |
| QSL-G1/4-8-50 | Push-in L-fitting · Push-in fittings | |
| QSL-G1/4-6-100 | Push-in L-fitting · Push-in fittings | |
| QSL-G1/4-10-50 | Push-in L-fitting · Push-in fittings | |
| QSL-G1/4-12-20 | Push-in L-fitting · Push-in fittings | |
| QST-G1/4-6-100 | Push-in T-fitting · Push-in fittings | |
| QST-G1/4-8-50 | Push-in T-fitting · Push-in fittings | |
| QST-G1/4-10-50 | Push-in T-fitting · Push-in fittings | |
| QSTL-G1/4-6-100 | Push-in T-fitting · Push-in fittings | |
| QSTL-G1/4-8-50 | Push-in T-fitting · Push-in fittings | |
| QSTL-G1/4-10-50 | Push-in T-fitting · Push-in fittings | |
| QS-G1/4-6-100 | Push-in fitting · Push-in fittings | |
| QSLL-G1/4-12 | Push-in L-fitting, long · Push-in fittings | |
| QST-G1/4-12 | Push-in T-fitting · Push-in fittings | |
| QS-1/4-10-I-50 | Push-in fitting · Push-in fittings | |
| QS-1/4-8-I-50 | Push-in fitting · Push-in fittings | |
| QS-1/4-6-I-100 | Push-in fitting · Push-in fittings | |
| NPFC-Y-3G14-F | Y-fitting · Other connectors | |
| NPFC-L-2R14-M | Elbow fitting · Other connectors | |
| NPFC-L-2G14-F | Elbow fitting · Other connectors | |
| NPFC-L-R14-G14-MF | Elbow fitting · Other connectors | |
| NPFC-Y-R14-2G14-MFF | Y-fitting · Other connectors | |
| NPFC-T-3G14-F | T-fitting · Other connectors | |
| NPFC-T-2G14-R14-FMF | T-fitting · Other connectors | |
| NPFC-T-R14-2G14-MFF | T-fitting · Other connectors | |
| NPFC-T-2R14-G14-MMF | T-fitting · Other connectors | |
| NPFC-X-4G14-F | X-fitting · Other connectors | |
| NPFC-X-R14-3G14-MFFF | X-fitting · Other connectors | |
| NPFC-T-3R14-M | T-fitting · Other connectors | |
| NPFC-T-G14-2R14-FMM | T-fitting · Other connectors | |
| NPFC-D-2G14-M | Double nipple · Other connectors | |
| NPFC-D-G14-G38-M | Double nipple · Other connectors | |
| NPFC-D-G14-G12-M | Double nipple · Other connectors | |
| NPFC-D-2R14-M | Double nipple · Other connectors | |
| NPFC-D-R14-R38-M | Double nipple · Other connectors | |
| NPFC-D-R14-R12-M | Double nipple · Other connectors | |
| NPFC-S-2G14-F | Sleeve · Other connectors | |
| NPFC-E1-2G14-FM | Extension · Other connectors | |
| NPFC-R-G14-G18-MF | Reducing nipple · Other connectors | |
| NPFC-E2-2G14-FM | Extension · Other connectors | |
| NPFC-E3-2G14-FM | Extension · Other connectors | |
| NPFC-R-G14-G18-FM | Reducing nipple · Other connectors | |
| NPFC-R-G14-G18-F | Reducing sleeve · Other connectors | |
| NPFC-R-G14-M5-MF | Reducing nipple · Other connectors | |
| NPFC-D-2G14-M-P100 | Double nipple · Other connectors | |
| NPFC-R-G14-G18-MF-P100 | Reducing nipple · Other connectors | |
| NPFC-H-G14-F | Bulkhead fitting · Other connectors | |
| NPFC-DS-G18-G14-M | Double nipple · Other connectors | |
| NPFC-DS-G14-G14-M | Double nipple · Other connectors | |
| NPFC-RS-G14-G18-MF | Reducing nipple · Other connectors | |
| MS6-WP-F1A | Mounting bracket · Mounting accessories | |
| MS6-AGF | Connecting plate SET · Mounting accessories | |
| CK-1/4-PK-4 | Quick connector · Quick connectors | |
| CK-1/4-PK-6 | Quick connector · Quick connectors | |
| CK-1/4-PK-9 | Quick connector · Quick connectors | |
| LCNH-1/4-PK-4 | Barbed elbow fitting · Quick connectors | |
| LCNH-1/4-PK-6 | Barbed elbow fitting · Quick connectors | |
| LCK-1/4-PK-4 | Elbow quick connector · Quick connectors | |
| LCK-1/4-PK-6 | Elbow quick connector · Quick connectors | |
| TCK-1/4-PK-4 | T quick connector · Quick connectors | |
| TCK-1/4-PK-6 | T quick connector · Quick connectors | |
| MS6-WP-EX | Mounting bracket · Mounting accessories | |
| MS6-WPM-D | Mounting bracket · Mounting accessories | |
| MS6-WR | Mounting bracket · Mounting accessories | |
| MS6-AGB | Sub-base-SET · Mounting accessories | |
| MS6-AGD | Sub-base-SET · Mounting accessories | |
| MS6-AGC | Sub-base-SET · Mounting accessories | |
| MS6-AGE | Sub-base-SET · Mounting accessories | |
| MS6-WPM-2D | Mounting bracket · Mounting accessories | |
| MS6-WRS | Hex nut · Mounting accessories | |
| MS6-WB | Mounting bracket · Mounting accessories | |
| MS6-WP | Mounting bracket · Mounting accessories | |
| MS6-AEND1 | Mounting plate · Mounting accessories | |
| MS6-END | Cover cap · Mounting accessories | |
| LCK-1/4-PK-4-KU | Elbow quick connector · Quick connectors | |
| LCK-1/4-PK-6-KU | Elbow quick connector · Quick connectors | |
| TCK-1/4-PK-4-KU | T quick connector · Quick connectors | |
| TCK-1/4-PK-6-KU | T quick connector · Quick connectors | |
| CK-1/4-PK-6-KU | Quick connector · Quick connectors | |
| CK-1/4-PK-9-KU | Quick connector · Quick connectors | |
| CK-1/4-PK-4-KU | Quick connector · Quick connectors |
Related Products
View Details
Festo
MS6-LR-AGE-D6-MPA
MFR #MS6-LR-AGE-D6-MPA
SKU #YLS7GBDRWAUOEU
View Details
Festo
MS6-LR-AGE-D7-MPA
MFR #MS6-LR-AGE-D7-MPA
SKU #YLS6GMGQZV35JM
View Details
Festo
MS6-LR-AGE-D7
MFR #MS6-LR-AGE-D7
SKU #YLS1VHVIITI2ZDI
View Details
Festo
MS6-LR-AGE-D7-VS
MFR #MS6-LR-AGE-D7-VS
SKU #YLSCFNWL1S9FBZY
View Details
Festo
MS6-LR-AGF-D6
MFR #MS6-LR-AGF-D6
SKU #YLSFZ9TPKVGJDA
View Details
Festo
MS6-LR-AGF-D7-MPA
MFR #MS6-LR-AGF-D7-MPA
SKU #YLSTSSXOBXYN3AF
View Details
Festo
MS6-LR-AGF-D6-MPA
MFR #MS6-LR-AGF-D6-MPA
SKU #YLSC0MYH5RHBN7Q
View Details
Festo
MS6-LR-AGF-D7-VS
MFR #MS6-LR-AGF-D7-VS
SKU #YLSRCAJH3CMMRAM
View Details
Festo
MS6-LR-AGF-D7
MFR #MS6-LR-AGF-D7
SKU #YLS9ACTBV27WRQ
Featured Products
View Details
SMC
NCDGFN25-0100
MFR #NCDGFN25-0100
SKU #YLST0TDV975HLIN
View Details
Baldor
BM3615T W/ 2-1/4" LONG SHAFT
MFR #BM3615T W/ 2-1/4" LONG SHAFT
SKU #YLSUV0OKQIKNTRJ
View Details
Baldor
VM8001-5
MFR #VM8001-5
SKU #YLS3TOWVXWW0DHP
View Details
SMC
CDJ2L16-125Z-B
MFR #CDJ2L16-125Z-B
SKU #YLS5V0RW2VJJR1A
View Details
SMC
MGPL25TN-200BZ-XC9
MFR #MGPL25TN-200BZ-XC9
SKU #YLSPBI637NOCN0Y
View Details
Danfoss Aeroquip LLC
EH22512
MFR #EH22512
SKU #YLSRZ91UGVO64DG
View Details
SMC
CM2B40-75Z
MFR #CM2B40-75Z
SKU #YLSOGLJ512KWTEJ
View Details
SMC
ZCUKQ25-50D
MFR #ZCUKQ25-50D
SKU #YLSQ684QXTNN958
View Details
SMC
NCMC150-0600-X103US
MFR #NCMC150-0600-X103US
SKU #YLS468HQT0B65QG
View Details
SMC
MY1M20-200AH
MFR #MY1M20-200AH
SKU #YLSIZ8K8N4KBPBQ
Related Searches
Festo MS6-LR-1/4-D6-VS priceFesto MS6-LR-1/4-D6-VS quotebuy Festo MS6-LR-1/4-D6-VSMS6-LR-1/4-D6-VS priceMS6-LR-1/4-D6-VS stock availabilityFesto spare partsFesto MS6-LR-1/4-D6-VS equivalentFesto MS6-LR-1/4-D6-VS specifications