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Festo VEFC-L-6-200-D31-R14-R14-MRM1

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Festo VEFC-L-6-200-D31-R14-R14-MRM1

Mass flow controller (MFC). Very compact: only 24 mm wide. Directly controlled, dynamic piezo valve. Very flexible thanks to customisable control parameters. Excellent value for money. Sustainable operation thanks to efficient control

FestoMFR # VEFC-L-6-200-D31-R14-R14-MRM1SKU # YLSZIJFHMJWPTZ
Degree of protectionIP20
Flow rate control range10, 200
Flow directionNon-reversible
Operating pressure0.6
Operating pressure6
Overload pressure0.8
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About This Product

Mass flow controller (MFC). Very compact: only 24 mm wide. Directly controlled, dynamic piezo valve. Very flexible thanks to customisable control parameters. Excellent value for money. Sustainable operation thanks to efficient control

Festo VEFC-L-6-200-D31-R14-R14-MRM1

  • Genuine, certified Festo product
  • Fast sourcing through a worldwide supply network
  • Product selection and compatibility support from our technical team
  • Equivalent and alternative product suggestions
  • Quotation and lead time tailored to your request

Specifications

Degree of protectionIP20
Flow rate control range10, 200
Note on the flow rate control rangeN2 equivalent, the specified dynamic and accuracy values apply to setpoint values >10%FS
Flow directionNon-reversible
Operating pressure0.6
Operating pressure6
Overload pressure0.8
Overload pressure8
Overload pressure116
Burst pressure2.1
Burst pressure21
Burst pressure305
Inlet pressure 10.1, 0.7
Inlet pressure 11, 7
Inlet pressure 114.5, 101.5
Output pressure 2-0.1, 0.35
Output pressure 2-1, 3.5
Output pressure 2-14.5, 50.8
Suitability for vacuumYes
Valve function2-way proportional flow control valve
Type of actuationElectrical
Pneumatic connection, port 1R1/4
Pneumatic connection, port 2R1/4
Total leakage0.6
Note on total leakageStandardised according to SEMI E16 tested with CDA
Relative air humidity5 - 85%, Non-condensing
Climatic category3K22 in accordance with EN 60721
Nominal altitude of use<= 2000 m NHN
Operating mediumCompressed air to ISO 8573-1:2010 [7:4:4], Inert gas
Media temperature5, 50
Ambient temperature5, 50
Storage temperature-20, 60
Nominal operating voltage DC24
Operational voltage range DC24
Max. current consumption65
Max. electrical power consumption1.6
Information on power consumptionTypical <1 W
Overvoltage categoryII
Residual ripple± 10%
Electrical connection 1, functionCommunication, Power supply
Electrical connection 1, connection typePlug
Electrical connection 1, connector systemSub-D
Electrical connection 1, number of connections/cores9
Setpoint value input0 - 5 V, 0 - 10 V, 1 - 5 V, 4 - 20 mA, Modbus® RTU
Protection against direct and indirect contactPELV
Display typeLED
Reverse polarity protectionFor operating voltage
Total accuracy1.5 %FS
Reproducibility0.2
Linearity1.5
Hysteresis0.15
Overshoot2
Settling time500
Step response time500
Note on the measured variableDynamic characteristic values according to SEMI E17 with preset "fast". The dead time, the step response and the settling time may increase when the setpoint is changed from a closed valve state or wh
Product weight250
Note on materialsRoHS compliant
Dimensions (W x L x H)24 mm x 130 mm x 97 mm
Instructions on useThe product is suitable for industrial purposes only. Measures to eliminate radio interference may be required in residential areas., For indoor use only
Fire test materialUL94 HB
Pollution degree2
ApprovalRCM
CE mark (see declaration of conformity)To EU EMC Directive, In accordance with EU RoHS Directive
UKCA marking (see declaration of conformity)To UK instructions for EMC, To UK RoHS instructions
KC markKC-EMV
KC Approval No. EMC/RadioFTO-KC-2024-1003
LABS (PWIS) conformityVDMA24364 zone III
Suitability for the production of Li-ion batteriesSuitable for battery production with reduced Cu/Zn/Ni values (F1a)
Cleanroom suitability, measured according to ISO 14644-14Class 3 according to ISO 14644-1 (with CDA filter), Class 4 according to ISO 14644-1

Accessories 5

Genuine accessories that can be used with the Festo VEFC-L-6-200-D31-R14-R14-MRM1 motor and are supplied separately are listed below. Click a code to open the accessory page and see the other compatible motors.

Part noDescriptionCompatible motors
VAME-P20-24-KMounting kit · Mounting accessories
KMP6-09P-8-2,5Connecting cable · Connecting cables
KMP6-09P-8-10Connecting cable · Connecting cables
KMP6-09P-8-5 Connecting cable · Connecting cables
CDSV-P20-AOperator unit · General accessories

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